Gaylord
Chemical Company,
L.L.C. (GCC) is the world's
leading provider of Dimethyl
Sulfoxide (DMSO) solutions.
Beginning in the early
1960's ,GCC has been dedicated
to the development of new uses
for DMSO. In order to meet
customer-specific needs, GCC
has pioneered the development
of multiple grades of DMSO,
including DMSO USP.
Gaylord Chemical's solutions-
based approach has contributed
to the development and growth of
industries including
pharmaceuticals, hydrocarbons,
electronics, polymers, coatings,
agricultural chemicals, and
industrial cleaners.
Gaylord Chemical's headquarters
are located in Slidell, Louisiana
with manufacturing, research,
and development facilities in
nearby Bogalusa, Louisiana.
GCC remains the only producer
of DMSO in the Western
Hemisphere.
Bulletin
165B
Introduction
The manufacture of microelectronic devices uses a range of solvents
in a variety of applications. Solvents are chosen based upon their
properties to deposit coatings, remove photoresist and related poly-
mers, and to carry out general cleaning activities. As the electronics
industry continues to create new technologies and business models,
serious challenges exist in their efforts to improve cleaning, comply
with safety regulations, and to reduce cost. Dimethyl Sulfoxide
(DMSO), a common solvent for many polymers, is a key solution to
helping the industry meet their objectives. This bulletin provides per-
tinent information and guidelines in using DMSO in microelectronic
applications.
Contents
Process Objectives (page 2)
Investigation of DMSO in microelectronics (page 3)
Results of Investigations (page 3)
Conclusions and Applications (page 7)
Bibliography (page 8)
Appendix A -DMSO Properties (page 9)
Appendix B Health Safety and Environmental Overview (page
10)
Appendix C DMSO Material Compatibility (page 11)
Microelectronic
Applications using
DMSO
(Dimethyl Sulfoxide)
February
2008
Gaylord
Chemical Company, L.L.C.
Your
Global Leader For DMSO Solutions!
P.O.
Box 1209
Slidell,
LA 70459-1209 USA
1.800.426.6620
Office
1.985.649.0068
Fax
info@gaylordchemical.com